Fix SoC detection for SAM9X60 SiPs:
SAM9X60D5M
SAM9X60D1G
SAM9X60D6K

Fixes: af3a1051 ("drivers: soc: atmel: add per soc id and version match masks")
Signed-off-by: Mihai Sain <mihai.sain@microchip.com>
Signed-off-by: Claudiu Beznea <claudiu.beznea@microchip.com>
Link: https://lore.kernel.org/r/20220616081344.1978664-1-claudiu.beznea@microchip.com